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Product Introduction
Galatek InspiraInspect WF is designed for appearance defect inspection on patterned wafers. It supports both macro and micro defect detection, capable of identifying systematic defects as well as random defects on the wafer surface. As a high-performance inspection solution, it plays a key role in wafer fabs for product quality control and yield management.
Galatek InspiraInspect 3D is built upon the 2D wafer AOI platform, InspiraInspect WF, and further integrates 3D structural metrology capabilities. In addition to performing high-precision macro and micro defect inspection on wafer surfaces, it also enables three-dimensional measurement of critical structures. It serves as one of the core inspection systems for wafer fabs and OSAT facilities in yield management, process monitoring, and structural verification.
Fully automated post-dicing wafer inspection system built upon InspiraInspect WF. Enhanced with automated loading/unloading capability for post-dicing wafers with ring frames, Specialized defect-inspection algorithms optimized for post-dicing wafer characteristics, Inspection capability for wafer expansion-film defects.
Galatek InspiraInspect WF+ is designed for advanced process inspection. Building upon the standard wafer inspection system, InspiraInspect WF, it offers enhanced overall hardware precision, high-resolution imaging capability, high-accuracy real-time autofocus, and advanced process pattern defect detection. It is one of the core systems for process inspection and wafer yield management in MEMS, power semiconductor, and other advanced semiconductor manufacturing processes.
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