Laser Dicing_Galatek

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Laser Dicing
Laser Dicing
Galatek wafer laser dicing system is developed based on the spectral characteristics of process materials and advanced optical design, enabling high-precision and high-efficiency laser processing. The customized laser system supports the cutting of various brittle materials that are transparent to specific laser wavelengths, such as silicon carbide (SiC), sapphire, silicon, and glass, covering a wide range of process requirements.

Product Introduction

InspiraSlice LED/InspiraSlice SiC

InspiraSlice

InspiraSlice SAP

InspiraSlice LED/InspiraSlice SiC
InspiraSlice LED/InspiraSlice SiC

Galatek InspiraSlice LED / InspiraSlice SiC laser dicing system are precision laser processing tools based on internal-focus technology, designed specifically for cutting third-generation semiconductor silicon carbide (SiC) wafers. Developed on an advanced vision-technology platform, the system supports automatic contour recognition, automatic leveling, automatic reference point setting, and automatic focusing. The tool features a one-touch start design, enabling fully automated processing with barcode reading and recipe loading. It also integrates key production-line requirements, including production data logging, equipment utilization statistics, and data reporting.

InspiraSlice
InspiraSlice

Galatek InspiraSlice laser dicing system are precision laser processing tools based on internal-focus technology, designed for cutting silicon (Si) wafers. Developed on a vision-technology platform, the system integrates automatic contour recognition, automatic leveling correction, automatic reference-point setup, auto-focus, and other intelligent functions. The entire system is engineered for one-touch operation, supporting automated barcode reading and recipe loading. As a fully automated processing tool, it also incorporates production data logging, equipment utilization statistics, and data upload capabilities to meet semiconductor manufacturing standards.

InspiraSlice SAP
InspiraSlice SAP

Galatek InspiraSlice SAP laser dicing system is a high-precision, high-efficiency laser processing tool developed specifically based on the material characteristics of sapphire. By utilizing internal-focus laser cutting technology, the system enables high-quality machining of sapphire wafers. Developed on an advanced vision-technology platform, the system integrates functions such as automatic contour recognition, automatic leveling, automatic reference-point setting, and auto-focus. Designed for one-touch operation, it supports automatic barcode reading and recipe loading. As a fully automated production system, it also incorporates production data logging, equipment utilization statistics, and data uploading functions to meet semiconductor manufacturing standards.

Solution Feature

High Compatibility
High Compatibility
Supports 4-inch / 6-inch / 8-inch wafers
High Precision Motion Control
High Precision Motion Control
Achieves motion speeds up to 1000 mm/s with <1% variation during high-speed movement
High Cutting Accuracy
High Cutting Accuracy
Equipped with an FDC (Focus Depth Control) system for real-time cutting-depth adjustment, accommodating wafer thickness variations of ±15 μm
One-Touch Automated Operation
One-Touch Automated Operation
Integrated with automatic chuck loading/unloading, automatic leveling, auto-focus, auto-correction, and production data logging
Process Breakthrough
Process Breakthrough
No chemical treatment required; non-contact cutting results in no debris, no chipping, and a minimal heat-affected zone
User-Friendly Interface
User-Friendly Interface
Intuitive interface design for easy operation and quick training

Solution Feature

High Compatibility
High Compatibility
Supports 8-inch and 12-inch wafers
High Precision Motion Control
High Precision Motion Control
Achieves motion speeds up to 1500 mm/s with <1% fluctuation during high-speed travel
One-Touch Automated Operation
One-Touch Automated Operation
Integrated with automatic chuck loading/unloading, auto-leveling, auto-focus, automatic correction, and production data logging
High Cutting Accuracy
High Cutting Accuracy
Equipped with an FDC (Focus Depth Control) system for real-time depth adjustment, accommodating wafer thickness variations of ±15 μm
Breakthrough in Process Performance
Breakthrough in Process Performance
Non-contact cutting method with no residue generation, no chipping, and a minimal heat-affected zone
User-Friendly Interface
User-Friendly Interface
Intuitive interface design for easy operation and quick training

Solution Feature

High Compatibility
High Compatibility
Supports 4-inch and 6-inch LED wafers
High Precision Motion Control
High Precision Motion Control
Achieves motion speeds up to 1000 mm/s with <1% fluctuation during high-speed travel
One-Touch Automated Operation
One-Touch Automated Operation
Integrates automatic chuck loading/unloading, auto-leveling, auto-focus, auto-correction, and production data logging
High Cutting Accuracy
High Cutting Accuracy
Equipped with an FDC (Focus Depth Control) system to dynamically adjust the cutting position, accommodating wafer thickness variations of ±15 μm
Breakthrough Process Capability
Breakthrough Process Capability
Highly flexible, with the option to configure multi-spot cutting technology based on different material thicknesses
User-Friendly Interface
User-Friendly Interface
Intuitive interface design for easy operation and quick training

Application Scenarios

Semiconductor Wafers (Si, SiC)
Semiconductor Wafers (Si, SiC)
LED Wafers (Sapphire)
LED Wafers (Sapphire)
Mobile Phone Camera Filter (Glass)
Mobile Phone Camera Filter (Glass)

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