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Precision Motion Control
Galatek Precision Motion Control technology, integrating precision machinery, precision control, precision drive, precision sensor, precision measurement and precision integration technologies, is a comprehensive motion control technology with accuracy in micro nanometer level.
Kernel Modules
System Calibration and Error Compensation Technology
The software and hardware compensation technologies such as feedforward control and temperature compensation is used to adjust the output information including the number of transmission lines and nonlinear value obtained by measurement, so as to improve the accuracy and stability of the system.
Core Component Development for Motion Control
The core components such as NCS (non-contact sensor) tool non-contact measurement and FDC (focus depth control) laser dicing precision servo system are developed. The system repeatability and following accuracy are up to ±1μm.
Precision Servo Advanced Control Algorithm
Using advanced control algorithms including fuzzy PID control, self-adaptation control, sliding mode control, etc., the platform has higher accuracy and faster response speed. The fastest setting time is less than 10ms.
Precision Motion Control Platform Mechanism
A precision motion control platform with fully independent intellectual property rights is developed. With breakthrough of multiple key technologies , including finite element optimization design for high-precision displacement platform, high-precision displacement sensor, manufacturing assembly process, testing and calibration, etc., the platform has optimal ±100nm repeatability and ±0.5nm position holding stability.
Special Function
Intelligent Diagnosis and Maintenance
Potential failures can be predicted by monitoring system status through the network. Diagnosis and support can be provided.
Multi-axis Coordinated Control
By precisely controlling the pulse output of each axis, the motion speed and position of each axis can be synchronized according to the predetermined trajectory and speed, and the complex three-dimensional motion can be realized.
Smooth Motion
Reduce vibration and shock with an active damping algorithm that automatically adjusts force when touching sensitive surfaces to avoid damaging the product.
High Accuracy Positioning
Achieve position control accuracy at the micrometer or even nanometer level, and ensure smooth movement according to predetermined trace through accurate trajectory planning algorithms.
Application Scenarios
Semiconductor
Wafer processing: including wafer dicing and wafer handling;
Wafer inspection: including visual defect detection and 3D metrlogy of patterned wafers from a macro and micro perspective.
Wafer inspection: including visual defect detection and 3D metrlogy of patterned wafers from a macro and micro perspective.
Life Sciences & Healthcare
Micro liquid processing, such as micro liquid dispensing in biochemical analysis;
Automatic sample handling.
Automatic sample handling.
High Precision Measurement
High-resolution microscope objective positioning and sample movement.
Industrial Automation
High-speed handling of large-scale automated logistics warehousing system;
Precision assembly of tiny parts such as lenses and fiber optic connectors.
Precision assembly of tiny parts such as lenses and fiber optic connectors.
Applicable Industries
Semiconductor
New Display
Green Energy
Life Sciences & Healthcare
Clinical Diagnosis
Other Industries